JPS6322675Y2 - - Google Patents

Info

Publication number
JPS6322675Y2
JPS6322675Y2 JP1983106057U JP10605783U JPS6322675Y2 JP S6322675 Y2 JPS6322675 Y2 JP S6322675Y2 JP 1983106057 U JP1983106057 U JP 1983106057U JP 10605783 U JP10605783 U JP 10605783U JP S6322675 Y2 JPS6322675 Y2 JP S6322675Y2
Authority
JP
Japan
Prior art keywords
support
wafer
fitting
semiconductor wafer
sliding rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983106057U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6013742U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10605783U priority Critical patent/JPS6013742U/ja
Publication of JPS6013742U publication Critical patent/JPS6013742U/ja
Application granted granted Critical
Publication of JPS6322675Y2 publication Critical patent/JPS6322675Y2/ja
Granted legal-status Critical Current

Links

JP10605783U 1983-07-07 1983-07-07 ウエ−ハ支持移動具 Granted JPS6013742U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10605783U JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Publications (2)

Publication Number Publication Date
JPS6013742U JPS6013742U (ja) 1985-01-30
JPS6322675Y2 true JPS6322675Y2 (en]) 1988-06-22

Family

ID=30248349

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10605783U Granted JPS6013742U (ja) 1983-07-07 1983-07-07 ウエ−ハ支持移動具

Country Status (1)

Country Link
JP (1) JPS6013742U (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5318389A (en) * 1976-08-04 1978-02-20 Matsushita Electric Ind Co Ltd Wafer holding and handling device
JPS5364362A (en) * 1976-11-22 1978-06-08 Hitachi Ltd Machine hand

Also Published As

Publication number Publication date
JPS6013742U (ja) 1985-01-30

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